MULTI-BEAM SCANNING APPARATUS OF OPTICAL MODULATOR USING DICHRONICSLIT

摘要

Disclosed herein is a light modulator type multi-beam scanning apparatus using a dichroic slit. The scanning apparatus includes a first lens unit, a plurality of light modulators, a focusing unit, a second lens unit and a third lens unit. The first lens unit converts a plurality of beams of light into collimated beams, respectively, and outputs the collimated beams. The light modulators modulate the collimated beams into diffracted beams having a plurality of diffraction orders. The focusing unit forms a multi-diffracted beam by focusing the diffracted beams having the plurality of diffraction orders. The second lens unit separates the multi-diffracted beam into separate diffracted beams according to diffraction orders. The dichroic slit selectively transmits some of the separate diffracted beams having one or more predetermined diffraction orders. The third lens unit projects the sum of the separate beams onto an object.