APPARATUS FOR COMPENSATING STRAIGHTNESS ERROR OF LINEAR MOTOR STAGE AND SLIDING MODE CONTROL METHOD FOR THE SAME

摘要

disclosure is self-paced moving direction of the linear motion linear motor stage on the straightness error in each stator position and by measuring the straightness error in the measured position by using the stator electromagnetic actuator for controlling the straightness compensation unit and the compensation unit of the linear motor stage increase the straightness of the driving part by driving the slider in the opposite direction to the optimal compensation relates to a sliding mode control method. The present invention is provided on the movable element to the straight-running stage on the linear motor, the guide rail is formed in a direction perpendicular to the running direction of the mover; A slider that is coupled to be movable along the guide rail; And a magnetic material is fixed to any one side of the movable member and the slider, and the slider of the movable member is fixed to the other side of the straight-running error mover to move in a direction perpendicular to the running direction of the mover to the magnetic material an electromagnetic actuator having an electromagnet for compensation; Moving amount detecting sensor that detects the actual amount of movement of the slider; And a controller for applying a control current corresponding to the control input to the actual travel distance and the travel distance measured by the detection sensor group of the slider with a movement variation between the set reference input (command movement amount), the electromagnet to produce a control input of the electro-magnet includes.