SYSTEM FOR MEASURING AND CONTROLLING PRESS LOAD OF PROVE HEAD

摘要

The present invention is easily adjust the pressing force of the measurement head in a system for measuring the surface resistivity of the sample or relates to a measurement system that can be measured with the structure of pressing load. The structure of the measurement system in the case of existing systems can be divided into The fixture of the measuring head attached to the operation portion and the induction of operating up and down by a support structure fixed to the structure supporting the measuring head is guided retainer for fixing the measuring head The total weight of the structure and the measuring head has a structure that is operated by pressing force at the time of measurement. ; surface using a four-probe or two-probe resistance measurement system is widely used in the silicon wafer and the like elsidi panel surface resistance of various films and metals. This is a probe (tip) principle to measure the surface resistance of the sample using an electrical method in a state where the pressing surface of the measurement sample of the measurement head. However, this method is 10 / sq or more high-resistance material or thickness to be measured when the surface resistance of the thin film probe of the measuring head in the contact resistance occurs when the contact with the surface of the test sample which are closely related to the pressing load Existing methods are difficult to measure accurately. ; This invention is installed on the other side of the weight, such that the pulley to the fixed support so as to measure the pressing load easily adjusted according to the measurement of such a measurement head to the sample to achieve equilibrium with the total weight of the measuring head a structure connecting the main features of the weight. In other words, the total weight of the measuring head is fixed to the structure because the equilibrium surface when related to the sample when measuring the resistance put by selecting the weight of the weight measured on the measuring head. And, another way is to attach the sensor to measure the load on the fixed structure for connection with a measuring head for measuring relates to measuring systems for adjusting the load of the measuring head during measurement.