首页>
外国专利>
APPARATUS FOR TESTING MICROSTRUCTURE, METHOD FOR TESTING MICROSTRUCTURE, AND PROGRAM FOR TESTING MICROSTRUCTURE
APPARATUS FOR TESTING MICROSTRUCTURE, METHOD FOR TESTING MICROSTRUCTURE, AND PROGRAM FOR TESTING MICROSTRUCTURE
展开▼
机译:用于测试微结构的设备,用于测试微结构的方法以及用于测试微结构的程序
展开▼
页面导航
摘要
著录项
相似文献
摘要
Test sound wave is outputted from a speaker (2). A movable part of a three-axis acceleration sensor, which is a micro structure of a chip to be tested TP, moves due to the arrival of the test sound wave which is compression wave outputted from the speaker (2), that is, due to air vibrations. A change in the resistance value that changes in accordance with this movement is measured on the basis of an output voltage that is provided via probe needles (4). A control part (20) determines the property of the three-axis acceleration sensor on the basis of the measured data.
展开▼