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PROBE OF SCANNING PROBE MICROSCOPE HAVING A FIELD EFFECT TRANSISTOR CHANNEL AND FABRICATION METHOD THEREOF
PROBE OF SCANNING PROBE MICROSCOPE HAVING A FIELD EFFECT TRANSISTOR CHANNEL AND FABRICATION METHOD THEREOF
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机译:具有场效应晶体管通道的扫描探针显微探针及其制备方法
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摘要
A probe of a scanning probe microscope having a sharp tip and an increased electric characteristic by fabricating a planar type of field effect transistor and manufacturing a conductive carbon nanotube on the planar type field effect transistor. To achieve this, the present invention provides a method for fabricating a probe having a field effect transistor channel structure including fabricating a field effect transistor, making preparations for growing a carbon nanotube at a top portion of a gate electrode of the field effect transistor, and generating the carbon nanotube at the top portion of the gate electrode of the field effect transistor.
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