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DISK MASTER PRODUCING METHOD, DISK MASTER PRODUCING DEVICE, METHOD FOR DETECTING DIFFERENCE IN DISK MASTER TRAVEL DISTANCE, AND DEVICE FOR DETECTING DIFFERENCE IN DISK MASTER TRAVEL DISTANCE
DISK MASTER PRODUCING METHOD, DISK MASTER PRODUCING DEVICE, METHOD FOR DETECTING DIFFERENCE IN DISK MASTER TRAVEL DISTANCE, AND DEVICE FOR DETECTING DIFFERENCE IN DISK MASTER TRAVEL DISTANCE
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机译:盘制作方法,盘制作装置,盘差检测方法以及盘差检测装置
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摘要
This disk master producing method which realizes the accuracy of disk master feed by using a horizontal movement device which moves with curvature. A disk master producing method comprising a step for rotating a resist master (108) around its own axis, a step for moving the resist master (108), a step for reading a distance of travel on a locus of the center of the resist master (108) accompanying the aforesaid movement, a step for detecting the difference between the distance of travel on the locus of the center and the distance of travel on a straight line of the center of the resist master (108), and a step for controlling predetermined production parameters on the basis of the detection result.
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