首页> 外国专利> DISK MASTER PRODUCING METHOD, DISK MASTER PRODUCING DEVICE, METHOD FOR DETECTING DIFFERENCE IN DISK MASTER TRAVEL DISTANCE, AND DEVICE FOR DETECTING DIFFERENCE IN DISK MASTER TRAVEL DISTANCE

DISK MASTER PRODUCING METHOD, DISK MASTER PRODUCING DEVICE, METHOD FOR DETECTING DIFFERENCE IN DISK MASTER TRAVEL DISTANCE, AND DEVICE FOR DETECTING DIFFERENCE IN DISK MASTER TRAVEL DISTANCE

机译:盘制作方法,盘制作装置,盘差检测方法以及盘差检测装置

摘要

This disk master producing method which realizes the accuracy of disk master feed by using a horizontal movement device which moves with curvature. A disk master producing method comprising a step for rotating a resist master (108) around its own axis, a step for moving the resist master (108), a step for reading a distance of travel on a locus of the center of the resist master (108) accompanying the aforesaid movement, a step for detecting the difference between the distance of travel on the locus of the center and the distance of travel on a straight line of the center of the resist master (108), and a step for controlling predetermined production parameters on the basis of the detection result.
机译:该盘原版的制造方法通过使用以曲率移动的水平移动装置来实现盘原版的进给的精度。盘母盘的制造方法,包括使抗蚀剂母盘(108)绕其自身的轴旋转的步骤,使抗蚀剂母盘(108)移动的步骤,读取抗蚀剂母盘的中心轨迹上的移动距离的步骤(108)伴随上述移动的步骤,检测在抗蚀剂原版(108)的中心的轨迹上的移动距离与在中心的直线上的移动距离之间的差的步骤以及控制步骤根据检测结果确定预定的生产参数。

著录项

  • 公开/公告号KR20060081409A

    专利类型

  • 公开/公告日2006-07-12

    原文格式PDF

  • 申请/专利权人 MATSUSHITA ELECTRIC INDUSTRIAL CO. LTD.;

    申请/专利号KR20067004305

  • 发明设计人 ABE SHINYA;TSUKUDA MASAHIKO;

    申请日2006-03-02

  • 分类号G11B7/26;G11B7/085;G03F7/20;G01B11/00;

  • 国家 KR

  • 入库时间 2022-08-21 21:25:17

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