PARTICLE SAMPLER FOR SAMPLING PARTICULATE CONTAMINANTS FROM INSIDE OF HARD DISK DRIVE, AND PERFORMANCE VALUATION DEVICE OF THE SAME

摘要

The invention loss relates to a performance evaluation device for particle samplers and their particle sampler for particulate contaminants collecting generated within the hard disk drive, the particulate matter of micro and sub-micro size that occur in the hard disk drive in the low-flow-rate there is an effect that the absorption and the sampled particles can be analyzed by an electron microscope, Auger electron spectroscopy, etc., without additional work without. ; The particles according to the invention the sampler for this is that the body portion has a cylindrical shape the upper and lower portions are formed through the discharge port is formed and a positive electrode side; Inlet pipe provided with a nozzle which is installed on the inner diameter of the upper body portion on one side and discharged to the inside of the body portion through the nozzle to the inlet of the particle contained in the sampling air in the hard disk drive; Electrode which is installed in the inner diameter of the lower body portion, provided with a detachable sampling substrate for collecting the particles from entering the inside of the body portion and transfer the negative electrode to the sampling substrate; Installed in the outlet of the body portion and discharge pipe for discharging to the outside the particles are not trapped in the sampling substrate; Installed on the inner diameter of the body portion and the lower floor cover consisting of the electrode in the hole formed in the center by a non-conductive material so as to sandwiching fixed in one direction; And fixed by fastening the electrode protruding to the other side of the bottom cover and screw for supplying power to the electrode; and characterized in that it comprises a. ; Particle, a sampler, a hard disk drive, a pollutant, a sampling substrate