OPTICAL DEVICE CAVITY STRUCTURE, OPTICAL DEVICE, AND METHOD FOR MANUFACTURING AN OPTICAL DEVICE CAVITY STRUCTURE

摘要

The present invention is to pre-separation groove is provided a method of manufacturing soon as prepared, an optical component for an optical cavity device that takes the configuration for mounting the structure, the optical device, and an optical cavity structure, with the device, without being formed. ; Cavity structure for an optical device (C1) is made are laminated with an insulator layer (11, 13, 15) and metal layers (12, 14, 16) are alternately formed on the mounting is mounted on the wiring board, the wiring board and and the first terminal 112 to be electrically connected, and the cavity part (2) substantially having an opening (2a) of a square on the upper surface central portion, is formed is on the top surface surrounding the opening (2a), the optical element chip 121 is the light-receiving or light-transmitting member having a mounting portion (15a) which is light-transmitting member 124 is mounted for transmitting light for emission. ; Protrusion, the resist layer, the chip mounting, the optical element chip