Cavity resonator for reducing a phase noise of a voltage controlled oscillator

摘要

This invention is a semiconductor (silicon, GaAs, InP, etc.) by using the micromachining technology MMIC (Monolithic Microwave Integrated Circuit) VCO is described a cavity resonator for reducing the phase noise of electromagnetic waves emitted from the (Voltage Controlled Oscillator). Cavity resonator for reducing the phase noise of a voltage controlled oscillator according to the invention in accordance with the present invention co-existing metal (metal cavity) instead of the silicon or compound semiconductor microfabrication co ( ) to be adopted in a reflection type voltage controlled oscillator was combined with a microstrip line (microstrip line) so that, by making the upper ground plane metal film of the cavity corresponding to a micro-strip line to form a slot (isolation slot) for removing a predetermined standard isolated micro output from the voltage-controlled oscillator / mm reduces the phase noise of the waves.