APPARATUS FOR INSPECTING HANDLING PRECISON OF WORK HANDLING APPARATUS, APPARATUS FOR INSPECTING LITHOGRAPHY PRECISION OF LIQUID DROPLET DISCHARGE APPARATUS, LIQUID DROPLET DISCHARGE APPARATUS AND WORK, ELECTROOPTIC APPARATUS, METHOD OF MANUFACTURING ELECTROOPTIC APPRATUS AND ELECTRONIC INSTRUMENT

摘要

The present invention is to provide a challenge to the rendering accuracy checking apparatus of the droplet ejection apparatus which can determine the precision of the defect based on the ejection accuracy and precision defective function droplet discharge head according to the mechanical precision of the moving mechanism. ; A rendering accuracy check of the mobile device 11 while relatively moving the functional liquid droplet ejecting head (5) with respect to the workpiece (W) by a droplet discharge by discharging the functional liquid droplet which performs writing apparatus 1, function is mounted on a liquid drop ejection head (5) moving mechanism (11) juxtaposed to the according to the relative movement, coherent by irradiating light onto the work (W) the work (W) admitted (視 認) for performing possible stippled over stippled means 6 and will having a stippled control means (81) for driving the stippled stippled means 6 in a predetermined timing frequency. ; Accuracy, feature a droplet discharge head, imaging, work, coherent light, the timing frequency.