Apparatus and method of making a slip free wafer boat

摘要

The present invention provides a wafer boat for supporting a silicon wafer . The wafer boat includes a ceramic body having at least one wafer support structure is dimensioned so as to support the silicon wafer from the top . Surface of the wafer is coated with a ceramic slot . The ceramic coating has a thickness and a wafer contact surface movement preventing impurities . The wafer contact surface has a surface finish and coating that substantially prevents slip in the silicon wafer .