ELECTRIC FIELD TUNABLE PB-BASED PYROCHLORE DIELECTRIC THIN FILMS AND PROCESS FOR MAKING

摘要

The present invention relates to a field-variable dielectric thin film having a pyrochlore structure based on Pb and a method of manufacturing the same. The present invention is a solid solution thin film of Pb-X-Nb-O (where X is one element selected from the group consisting of Zn, Ni, Cu, and Mg) -based pyrochlore structure, the electric field when applying an electric field of 1000kV / cm Provided is a dielectric thin film characterized in that the electric field variable rate, which is defined as a percentage of the change in the dielectric constant of the thin film when the electric field is applied to the dielectric constant of the thin film when no application is applied, is about 10 to 43%. According to the present invention, it is possible to provide an electric field variable dielectric thin film having high dielectric constant, low dielectric loss characteristics, high electric field variable rate, and suitable for use as an electric field variable capacitor of a phase converter, a flat panel antenna, a filter, and the like.;Dielectric thin film, Pyroclaw phase, Pb-based dielectric, field variable capacitor, dielectric constant, dielectric loss, field variable rate, profit index