首页> 外国专利> ULTRAVIOLET RAYS IRRADIATION APPARATUS, SEMICONDUCTOR MANUFACTURING EQUIPMENT COMPRISING ULTRAVIOLET RAYS IRRADIATION APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPMENT COMPRISING WAFER SAWING MACHINE

ULTRAVIOLET RAYS IRRADIATION APPARATUS, SEMICONDUCTOR MANUFACTURING EQUIPMENT COMPRISING ULTRAVIOLET RAYS IRRADIATION APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPMENT COMPRISING WAFER SAWING MACHINE

机译:紫外线照射装置,包括晶片切割机的紫外线制造装置和半导体制造设备

摘要

The present invention relates to an ultraviolet irradiating apparatus for irradiating ultraviolet rays to easily separate the semiconductor chips or packages from a semiconductor wafer, or a strip attached to the support frame, it is installed in the UV housing and the UV housing, the wafer and ultraviolet ray lamps for irradiating with ultraviolet rays, is installed in correspondence with the UV lamp to the inside of the ultraviolet light housing, a screen to limit the irradiation range of the ultraviolet rays emitted from the UV lamp to be irradiated only to a semiconductor chip attachment sites available on the wafer It is configured to include a mounting plate is formed, to ensure that the scrap of the adhesive tape, the adhesive strength is still kept attached, and the separation step of a semiconductor chip or a package to be smoothly performed. ; A semiconductor chip, wafer, UV irradiation
机译:紫外线照射装置技术领域本发明涉及一种紫外线照射装置,该紫外线照射装置照射在紫外线中,以容易地将半导体芯片或封装体与半导体晶片或安装在支撑框架上的带分离,将其安装在UV壳体和UV壳体中。与紫外线灯相对应地将用于照射紫外线的紫外线灯安装到紫外线壳体的内部,该屏幕限制从紫外线灯发射的仅照射到半导体芯片的紫外线的照射范围。晶片上可用的附着位点配置为包括安装板,以确保胶带的碎屑,粘合强度仍保持附着状态,并且半导体芯片或封装的分离步骤能够顺利进行。 ;半导体芯片,晶圆,紫外线照射

著录项

  • 公开/公告号KR100595363B1

    专利类型

  • 公开/公告日2006-06-30

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20040110830

  • 发明设计人 정현권;이용구;나익균;

    申请日2004-12-23

  • 分类号H01L21/78;

  • 国家 KR

  • 入库时间 2022-08-21 21:23:32

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号