Method for manufacturing micro-lens in Silicon On Insulator substrate and method for manufacturing micro-column module using the same

摘要

invention electron beam lithography (e-beam lithography) equipment used in micro-lenses (micro-lens) is related to the manufacturing method and the micro-column using the same (micro-column) module manufacturing method. The silicon layer is a hole for the lens and the electrical contact to bonding the pyrex glass (Pyrex glass) formed on SOI (Silicon on Insulator) substrate, and a microlens produced, by joining multiple sheets of micro-lenses in the multi-layer to produce a micro-column module. Exactly the thickness of the silicon layer by using an SOI substrate, and can easily be controlled, a plurality of microlenses on a substrate can be formed at the same time. In addition, a number of substrates a plurality of micro lenses are formed because of the production of the micro-column module by aligning and bonding a multi-layer process simple and the cost is reduced.