apparatus for measuring the refractive index profile of optical devices using confocal scanning microscopy

摘要

optical element refractive index measuring apparatus using an optical element according to principles of this invention, an optical device to measure the index of refraction atoms X, Y, Z direction position adjustment that the position adjustment means; LED (Light Emitting Diode) and for outputting a light source of a single wavelength; The source light output from the LED circularly symmetric beam (circular symmetric beam) to circularly symmetric beam output means for outputting the converted; Output means for outputting a parallel light by converting the circularly symmetric beam into parallel light and; The parallel light and the 1 / 2 wave plate is transmitted; A polarization beam splitter for dividing the light transmitted through the first 1 / 2 wave plate (polarizing beam splitter) and; And Claim 1 / 4 wave plate of the circularly polarized light to output the light from the light transmitted through the state the polarization beam splitter; The claim 1 / 4 a circularly polarized state of light output from the wave plate and a focusing lens for focusing (focusing) in the optical element measuring section; The optical element of the focusing lens and the light reflected from the measurement section of claim 1 / 4 wave plate and the polarization beam splitter for receiving through the reflected light power measuring section measures the optical element, and from the reflected light power comprises a reflection light detection means for calculating the refractive index.