NOZZLE CLEANER AND DEVELOP APPARATUS USING THE CLEANER

摘要

The present invention relates to an apparatus for cleaning a nozzle having a long length in one direction, wherein the apparatus has a slot into which the nozzle discharge portion is inserted. Initially, the cleaning liquid is supplied into the slot to remove foreign substances attached to the nozzle discharge part, and then, dry gas is supplied into the slot to remove the cleaning liquid remaining in the nozzle discharge part.;Nozzle, Washer, Slot, Wash, Dry