Optical illumination system of pattern inspection using line CCD

摘要

PURPOSE: An optical illumination system for inspecting a pattern using a line CCD is provided to improve an optical efficiency by using a spherical lens. CONSTITUTION: An optical illumination system of inspecting fine patterns using a line CCD(3) employs a coaxial image forming scheme and hides a half of a lens using a mirror. The optical illumination system uses a line light source formed with LED arrangement or optical fiber. The optical illumination system irradiates the fine patterns to be inspected. The optical illumination system uses a spherical lens(8) as a cylinder lens. A cylinder lens(9) is realized by cutting a cylinder rode in two. The cut surface of the cylinder rode is polished so that a volume of the optical illumination system is reduced.