Processing chamber of FPD manufacturing machine for forming coldness and warmth circulation-line in the inner wall

摘要

The present invention relates to a process chamber of a cold circulation path is formed of a flat panel display device manufacturing equipment to the inner wall, by forming a cold circulation path by circulating more particularly circulation medium for maintaining a constant temperature inside the process chamber to the inner wall of the process cheombeo, and ease of machining of the cold circulation path having various shapes, the smooth circulation of hot water to relates to a process chamber of a flat panel display device manufacturing equipment cold circulation path is formed in the inner wall, and can be secured to parts of the process chamber wall temperature uniformity. ; That is, the present invention provides a process chamber cold circulation path is formed, the method, and a process chamber consisting of a plurality of walls and a bottom portion and a ceiling portion, with the hot and cold formed to be communicated with the circulation path of the negative inner wall portion of the wall, the cold circulation path including the inner wall attached to the inner wall portion of the wall is formed The configuration features.