Installation for vacuum ion-plasma deposition coatings

摘要

1.installation of u0434u043bu00a0 vacuum ion plating plasma u043du0430u043du0435u0441u0435u043du0438u00a0, u0432u043au043bu044eu0447u0430u044eu0449u0430u00a0 vacuum chamber, a plasma source, the system u0432u0430u043au0443u0443u043cu0438u0440u043eu0432u0430u043du0438u00a0, filing and u0440u0435u0433u0443u043bu0438u0440u043eu0432u0430u043du0438u00a0 races the gas sources u043fu0438u0442u0430u043du0438u00a0 and block u0443u043fu0440u0430u0432u043bu0435u043du0438u00a0, at the same time, the camera is provided with lids, openings are hermetically u0441u043eu0435u0434u0438u043du00a0u0435u043cu044bu043cu0438 camera installed at the bottom of plasmaand they have the possibility of limited u0432u0440u0430u0449u0435u043du0438u00a0 lid around its axis relative to the vacuum chamber, u043eu0442u043bu0438u0447u0430u044eu0449u0430u00a0u0441u00a0, made in the form of u043au0440u0443u0433u043e lid number of flanges mounted with the possibility of u043fu0435u0440u0435u043cu0435u0449u0435u043du0438u00a0 in u043du0430u043fu0440u0430u0432u043bu00a0u044eu0449u0438u0445 pivot frames, u0448u0430u0440u043du0438u0440u043du043e assigned and recorded on the camera.;2. installation of u0434u043bu00a0 vacuum ion plasma coatings on u043du0430u043du0435u0441u0435u043du0438u00a0 1, u043eu0442u043bu0438u0447u0430u044eu0449u0430u00a0u0441u00a0, equipped with at least u0434u0432u0443u043cu00a0 lids, in the form of circular flanges with u0443u0441u0442u0430u043d u043eu0432u043bu0435u043du043du044bu043cu0438 plasma sources, located opposite each other on opposite sides of u0441u043eu043eu0441u043du043e shell chamber.;3. installation of u0434u043bu00a0 vacuum ion plating plasma u043du0430u043du0435u0441u0435u043du0438u00a0 on 1 or 2, u043eu0442u043bu0438u0447u0430u044eu0449u0430u00a0u0441u00a0, installation of circular flanges is executed on the inside cook u043eu0442u043du043eu0439 frame with brackets, bearing on his two shoulders, two roller hub forming u043du0430u043fu0440u0430u0432u043bu00a0u044eu0449u0438u0435 u0434u043bu00a0 circular flanges, and installed in the upper and lower third part for forming the central u043eu0442u0432u0435u0440u0441u0442u0438u00a0 frames.;4. installation of u0434u043bu00a0 vacuum ion plasma coatings on u043du0430u043du0435u0441u0435u043du0438u00a0 2, u043eu0442u043bu0438u0447u0430u044eu0449u0430u00a0u0441u00a0 so that each of the brackets, bearing on his two shoulders of the roller hubs, zack u0440u0435u043fu043bu0435u043d its central part of the turning frame through a hinge axis which is u0432u0440u0430u0449u0435u043du0438u00a0 u043fu0435u0440u043fu0435u043du0434u0438u043au0443u043bu00a0u0440u043du043eu0439 line through the axis of the roller u0443u0437u043b u043fu0440u043eu0445u043eu0434u00a0u0449u0435u0439 s of each of the brackets and the upper and lower hinges coincide.