Device and method for the recognition and distinguishing of geometrically of different types of compartment forming supports in cassettes and wafer-shaped objects deposited thereupon

摘要

Device for detecting and differentiation of geometrically of different types of compartment forming supports in cassettes and wafer-shaped objects placed thereon by means of joint adjustment of the supports and objects relative to a measuring plane in the direction of superimposed compartments, in the case of the end faces of the supports and objects pass through successively bundle, characterized in that the number of the bundle (11, 12) of the number of types of supports, and each of the bundle (11, 12) in each case in the region of a type of supports (1, 2) is placed, in which this type of the other types - geometrically, that the end faces of the supports (1, 2) in their extension in the measuring plane (e - e) completely from the bundle (11, 12) are detected and that, with each bundle (11, 12) measured signal curves are subject to a simultaneous and correlative evaluation.