Interference measurement of absolute dimensions of the cylindrical surfaces, with a grazing incidence

摘要

Cylindrical surfaces of a test cylinder are measured with a grazing incidence interferometer. Separate measures of a test cylinder's cylindrical surface and a master cylinder's surface are made and compared to obtain absolute measures of the test cylinder's surface. Surface fitting techniques are used to discount the effects of positioning errors, and a separate measurement is used to resolve remaining ambiguities for extending the range of test cylinder sizes that can be measured with absolute dimensions.