Method for the optimization of the imaging properties of at least two optical elements, and method for the optimization of the imaging properties of at least three optical elements

摘要

Method for the optimization of the imaging propertiesof at least two optical elements, in which at least one of the optical elements relative to at least one stationary optical element is moved, characterized by the following process steps:a) measuring (19) of the results from the imaging errors of the movable optical element (7; 207) and the imaging errors of the stationary optical element (8; 208) composed of overall image defect of all the optical elements, in which case all optical elements of measuring light pass through the;b) representing (20) of the measured overall image defect seeds of the basic functions as a linear combination of orthogonal functions set;c) moving the movable optical element (7; 207) relative to the stationary optical element (8; 208) into a new measuring position (23);d) renewed measuring (21) of the results from the imaging errors of the movable element (7; 207) and the imaging errors of the stationary optical element (8; 208) composed of new overall image defect of all the optical elements, in which case all optical elements of measuring light pass through the;e) display (22) of the new overall image defect seeds as a linear combination..