Gas injector - arrangement with gas injectors of a ceramic material block with gas injector holes extending through them, and a gas injector - arrangement contained in a plasma

摘要

Gas injector - arrangement with a plurality of gas injectors (150), each of which:a ceramic material block (405), which has a first cylindrical section (410) and a second cylindrical portion (420), extending from the first cylindrical portion of, wherein the outer diameter of the second cylindrical section is less than that of the first cylindrical portion, and in which the length of the second cylindrical section is less than that of the first cylindrical section; anda gas injection section (430), the first holes (430a) extending through the first cylindrical section of the ceramic material block (405) and second holes (430b) extending through the second cylindrical section of the block extend, wherein the second holes have a diameter, which is smaller than that of the first holes, and wherein the second holes have an axial length, which is shorter than that of the first holes, and wherein each of the second holes of a corresponding one of the..