A process for the evaluation of backscattered electrons - diffraction patterns of crystalline substances

摘要

A process for the evaluation of backscattered electrons - diffraction patterns of crystalline substances (a), which upon irradiation of a predetermined material region with electrons (b) as a result of the electron diffraction at the crystal lattice are produced, wherein the backscattered electrons (c) with a first local resolution on a screen (d) and with a camera (e) with a second local resolution to be imaged, characterized in that an electron optical arrangement (f) is used, which the divergence of the webs of the backscattered electrons (c) in a predetermined spatial angle range is increased, and after a predetermined function as a result, the first local resolution increases.