首页>
外国专利>
Contactless diffraction grating position angle measurement system has angled retroreflector and aperture stop with exact openings providing optical system focal plane scale
Contactless diffraction grating position angle measurement system has angled retroreflector and aperture stop with exact openings providing optical system focal plane scale
A contactless diffraction grating angle measurement system has an angled retroreflector (5) with angle invariant in one or two planes and aperture stop (4) with exact openings (4-1, 4-2) providing measurement (7) of the optical system focal plane (6) scale for distance determination.
展开▼