Apparatus and method for the combined interferometric and imaging geometry recognition based, in particular, in microsystem technology

摘要

Apparatus and method for the combined planar detecting height values of an object by means of interferometry (interferometric measuring mode) and for measuring the lateral dimensions of geometric elements by means of recording and a digital evaluation of optical images of the object of measurement (image processing mode), characterized in that a lens is used, which in one part of the spectrum of electromagnetic waves and acts as interference objective of a different portion of the spectrum of a pure optical imaging of the object of measurement, so that by varying the spectral composition of the light used for the incident light - illumination from the interferometric measuring mode in the image processing mode can be changed.