Device for providing a reproducible target stream for the energy beam induced generation of short-wave electromagnetic radiation

摘要

The invention relates to a device for providing a reproducible target current for the energy beam induced generation of short-wave electromagnetic radiation.The object, a new possibility of providing a reproducible target current output (21) for the generation of a short wavelength radiation (52) emitting plasma (5) which, for any desired target materials under the respective process conditions, a high directional stability of the target current (21) over a large number of individual plasma generating processes is ensured, is solved according to the invention, that is, in the interaction chamber (1) a nozzles protection device (4) between the target nozzle (2) and the interaction point (23) in order to generate the plasma (5) is present and the nozzles protection device (4) has a gas pressure chamber (41), wherein the gas pressure chamber (41) along the target path (22), an aperture (42) for unimpeded passage of the target current (21) and with a buffer gas (6) is filled under a pressure of a few 10 mbar is held.