Vibration sensor for use in vibration analysis system, has sensor structure arranged such that input signal parts of sensor signal having natural frequency is strengthened and signals parts with other frequencies are suppressed

摘要

The sensor has a sensor structure (6) manufactured by a silicon-micro technology and comprising four springs suspended on a frame (8). The structure is arranged such that input signal parts of a sensor signal having a natural frequency is strengthened and the parts with other frequencies are suppressed. A crest system for capacitive signal detection and for electrostatic frequency adjustment is arranged at a movable resonator (7). Independent claims are also included for the following: (A) a vibration analysis system comprising a vibration sensor (B) a method for analysis of vibration.