Collimator for vacuum deposition installations comprises a lance tube arranged on the side of a collimator tube facing away from the plasma for closing the opening of the collimator tube

摘要

Collimator comprises a lance tube (4) arranged on the side of a collimator tube (2) facing away from the plasma for closing the opening (3) of the collimator tube. The lance tube is closed on the counter side of the plasma using a protective plate (6). Holes (11) are provided on the periphery of the lane tube and a gas inlet (10) is arranged in the collimator tube between the lance tube and a lens (9).