3D - and 2d - measuring system and - a method with increased sensitivity and an increased dynamic range

摘要

An interferometric method for determining a height profile of an object, comprising the steps of:Obtaining a first set of at least two image characteristics under a first acquisition condition,Obtaining a second set of at least one image feature a second acquisition condition,Combining the image features for the formation of a combined image characteristic and determining the height profile with the use of the combined image characteristic and a phase value in connection with a surface.