Cleaning apparatus for process chamber in isolator, has vibration device which performs vibrational excitation of cleaning medium

摘要

A process chamber (3) is sealed within the housing of an isolator (1). A supply apparatus (6) introduces at least one cleaning medium in process chamber. A discharging apparatus, with an outflow opening (26), an outflow conduit (27), and valves (28), derives cleaning medium from process chamber. A vibration device (29) performs vibrational excitation of the cleaning medium. An independent claim is also included for a process chamber cleaning method.