Infrared sensor, infrared - a gas detector and infrared radiation source

摘要

An infrared sensor (100) comprises a substrate (110), a membrane (120) as a thin-walled section, which on the substrate (110) is formed, a detection element (130) for generating a detection signal on the basis of a change in temperature, which occurs when infrared radiation is received, wherein at least a portion thereof on the diaphragm (120) is formed, and an infrared rays - absorption layer (140) on the diaphragm (120) is formed that it is at least a part of the detecting element (130) covers. The sensing element (130), according to the outside via a sensor contacting portion (118), which, at one end portion of the detecting element (130) is provided, and are electrically connected to the. A substrate surface, the sensor contacting portion (118) and the infrared radiation - absorption layer (140), is provided with a protective layer (150) is coated from parylene.