use of a networked elastomerenzusammensetzung to seal a halbleiterherstellungsvorrichtung

摘要

To provide a crosslinkable elastomer composition which is excellent in mechanical properties, ensures a small amount of outgas such as DOP and is suitable as a very clean material for molded article for semiconductor production apparatuses. The composition comprises a crosslinkable elastomer component and ultra fine powders of silicon oxide, in which the ultra fine powders of silicon oxide have 100 x 1019 or less hydroxyl groups per gram on surfaces thereof, dioctylphthalate adsorption of not more than 8 mu g per 1 g of silicon oxide and an average particle size of not more than 0.5 mu m.