device for measuring a physical magnitude, methods for their production and fahrzeugsteuersystem with equipment for measuring a physical magnitude

摘要

It is an object of the present invention to provide a simple-structure physical quantity detecting device whose resistance does not vary irrespective of use for long periods, a method for manufacturing thereof and a motor vehicle control system using the physical quantity detecting sensor to improve its reliability. An airflow sensor (20) is equipped with a heat generating resistor (12H) and a temperature measuring resistor (12C), formed on a semiconductor substrate (11). The heat generating resistor (12H) is formed in a thin-wall portion (11A). Both end portions of the heat generating resistor (12H) are connected through first lead conductors (13H1, 13H2) to electrodes (14H1, 14H2), respectively. A second lead conductor (15H1) connected to the electrode (14H1) extends to an outer circumferential portion of the airflow sensor (10). A second lead conductor (15H2, 15H3) connected to the electrode (14H2) also extend to the outer circumferential portion of the airflow sensor (10), but a disconnection portion (16) is made in the middle thereof to establish electrical non-conduction. IMAGE