Grid part chen mirror microscope

摘要

The invention relates to a scanning particle mirror microscope and to a method for imaging the surface of a specimen (6) with a source (1) for generating a primary particle beam, at least one lens arrangement (3) for focussing the primary particle beam, a scan deflection system (4) in order to deflect the primary particle beam over the specimen, and a detector (5) for detecting particles. Furthermore, means (7) are provided for generating a retarding field above the specimen, wherein the retarding field is adapted in that at least a part of the primary particle beam is reflected before it reaches the specimen and at least some of the reflected particles reach the detector. The scan deflection system is disposed really or virtually in the front focal plane of the lens arrangement.