Xy - table for displacing a load with a high precision and high dynamic response

摘要

The table (A) has a base (1) on which is mounted a first plate (2) free to move along an axis (X). A second plate (3) above the first plate (2) is free to move along an orthogonal axis (Y) and is solidly attached to a carriage (4), which bears a load (CH). The carriage (4) is driven by electric linear motors (B,C) through linking plates (7) on their mobile elements (6). The motor stators (5) have alternate north and south pole permanent magnets laid transversely along their active axes and the mobile elements (6) have windings to produce a complementary magnetic system. Air or magnetic bearings are used and table displacements are automatically controlled. The length of the permanent magnets used in the motor stator exceeds the corresponding width of the mobile element windings by at least the displacement of the other motor.