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Closed chamber inert cycle validation procedure consists of measuring pressure variation, presence of inert gas and oxygen level in chamber after injecting inert gas

机译:密闭腔室惰性循环验证程序包括在注入惰性气体后测量压力变化,惰性气体的存在和腔室内的氧气水平

摘要

The procedure, for use in industrial production to ensure that a chamber (100) is rendered inert, consists of 1) measuring the pressure variation in the chamber after reducing the pressure inside it to below atmospheric, 2) checking that the depression is stable over a period of time, 3) verifying the presence of an inert gas upstream of the chamber during the gas feed cycle, 4) measuring the variation in the proportion of oxygen in the chamber following the inert gas injection, and 5) checking that the pressure inside the chamber is the same as atmospheric. Stages 1) and 2) are repeated as necessary, and an alarm system sets off a signal when there is a fault in any of the stages.
机译:该过程用于工业生产,以确保腔室(100)呈惰性,包括以下步骤:1)在将腔室内的压力降低至大气压以下之后测量腔室内的压力变化; 2)检查压降在整个过程中是否稳定一段时间; 3)在供气周期中验证腔室上游是否存在惰性气体; 4)测量注入惰性气体后腔室内氧气比例的变化; 5)检查压力室内的空气与大气相同。必要时重复步骤1)和2),并且在任何一个阶段出现故障时,警报系统都会发出信号。

著录项

  • 公开/公告号FR2883491A1

    专利类型

  • 公开/公告日2006-09-29

    原文格式PDF

  • 申请/专利权人 ANTICIPIA SOCIETE A RESPONSABILITE LIMITEE;

    申请/专利号FR20050002967

  • 发明设计人 DURY JEAN LUC;

    申请日2005-03-25

  • 分类号B01J19/14;B01L1;

  • 国家 FR

  • 入库时间 2022-08-21 21:17:15

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