Atomic force microscope (AFM) lateral force calibration

摘要

A micro-machined calibration device 10 for lateral force calibration in small force measuring devices such as atomic force microscopes (AFMs) has a platform 20 with a substantially planar surface including a slot 25 for accommodating at least part of an AFM cantilever tip. One or more supporting legs 40 provide sprung resistance to the platform 20, and a capacitive drive means drives the platform 20 laterally with respect to the AFM cantilever tip. Also disclosed is a method of determining the torsional constant of a small force measuring device using the calibration device, and a method of determining the spring constant of the calibration device itself.