INITIAL CRACK FORMING MECHANISM

摘要

PPROBLEM TO BE SOLVED: To provide an initial crack forming mechanism which forms an extremely fine initial crack at an accurate position with an excellent repeatability. PSOLUTION: The initial crack forming mechanism 30 is equipped with a cutting blade unit 1 which has a cutting blade 17 at the tip end opposed to a substrate K, can be relatively moved to the direction Y along the cutting schedule line J, and is turnably pivoted around the horizontal axis 15 perpendicular to the direction of relative movement, a first holding means 5 which regulates the cutting blade unit from turning around the horizontal axis in a state holding the cutting blade at an initial crack forming position P1, and can release the holding by a resistance force at the time when the cutting blade collides with a starting end of the cutting schedule line in a substrate, and a second holding means 4 which holds the cutting blade unit where the holding by the first holding means is released by the collision so as to turn around the horizontal axis and so that the cutting blade is positioned at a retreated position P2. PCOPYRIGHT: (C)2008,JPO&INPIT