METHOD OF DEPOSITING METAL LAYER ONTO SUBSTRATE AND METHOD FOR MEASURING TOPOGRAPHICAL FEATURE OF SUBSTRATE IN THREE DIMENSIONS

摘要

PROBLEM TO BE SOLVED: To provide a method of depositing a metal layer onto a substrate, and to provide a method for measuring a topographical feature of a substrate in three dimensions.;SOLUTION: A precursor gas may be introduced above a sample using a gas injection system tubular nozzle 50 of about 0.7 mm diameter. A gas flux of about 8×10¹⁷mol/cm²s is used. In the embodiment illustrated in a figure, two nozzles 50 and 60 are present and two different precursor gases 55, 65 are introduced above a substrate. An electron beam 70 of a scanning electron microscope (scanning the area of interest) is used to activate the precursor gas 55, 65 and this results in deposition of a metal layer over the topographical features of the substrate in the selected area 40.;COPYRIGHT: (C)2007,JPO&INPIT