首页>
外国专利>
PROCESS AND DEVICE WHICH PREVENT CARBON MONOXIDE POISONING IN PERIPHERAL EDGE OF SUBSTRATE IN THIN-FILM DEPOSITION SYSTEM
PROCESS AND DEVICE WHICH PREVENT CARBON MONOXIDE POISONING IN PERIPHERAL EDGE OF SUBSTRATE IN THIN-FILM DEPOSITION SYSTEM
展开▼
机译:薄膜沉积系统中防止基质周边发生一氧化碳中毒的过程和装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
PROBLEM TO BE SOLVED: To provide a method and device which prevent carbon monoxide poisoning of a thin metal film formed on a substrate by use of a metal carbonyl precursor.;SOLUTION: The thin metal films 840 and 860 are formed on substrates 25 and 125 mounted on the thin-film deposition systems 1,100 and the substrate holders 20 and 120. The substrate holders 20 and 120 have protective rings 21 and 124 which are mounted in the peripheral edges of the substrate holders 20 and 120 and surrounds the peripheral edges of substrates 25 and 125. The protective rings 21 and 124 prevent formation of CO by-product in the peripheral edges of substrates 25 and 125.;COPYRIGHT: (C)2008,JPO&INPIT
展开▼