MINUTE HEAT QUANTITY MEASURING INSTRUMENT AND MINUTE HEAT QUANTITY MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a minute heat quantity measuring instrument for measuring a minute heat quantity, in a short time.;SOLUTION: This minute heat quantity measuring instrument is equipped with a substrate 31, and temperature measuring parts 35 and 36 fixed on the substrate 31, and comprises a bridge flow path 32 crossing over an opening part 31a in the substrate 31 and abutting against the measuring parts 35 and 36.;COPYRIGHT: (C)2008,JPO&INPIT