SURFACE CONDITION TESTING METHOD AND SURFACE CONDITION TESTING DEVICE

摘要

PROBLEM TO BE SOLVED: To enable to perform inspection based on the specular reflection for the whole inspection surface, even when the inspection surface includes the parts of mutually different curvatures.;SOLUTION: The inspection is performed by fixedly arranging the camera 1 and the illumination device 2, capable of emitting the illumination light along the optical axis of the camera 1, and fixing the work W to be inspected to the tip arm 35 of the 6-axis robot 3. At the preparation mode preceding the inspection, the position and attitude of the work W are fixed so as to image, by dividing into a plurality of imaging objective region, and furthermore, the inspection objective region to the formation image is defined. At this time, any part in the inspection surface necessarily appears in 1 or 2 or more inspection objective regions, and at the same time, the inspection objective region of any image is set so as to be included in the region of specular reflected light image.;COPYRIGHT: (C)2007,JPO&INPIT