METHOD FOR MANUFACTURING QUARTZ WAVE PLATE AND QUARTZ WAVE PLATE

摘要

PROBLEM TO BE SOLVED: To provide a quartz wave plate having high thickness precision; and a method for manufacturing the same.;SOLUTION: The quartz wave plate is obtained by cutting (S101) a first quartz plate out of an artificial quartz grown by a hydrothermal synthesis method, then polishing (S102) the first quartz plate to have a thickness thinner than a desired plate thickness value, and forming (S103) a second quartz plate by homoepitaxially growing a quartz thin film having a difference thickness, obtained by subtracting the thickness of the first quartz plate from the desired plate thickness value, on the polished surface of the first quartz plate by an atmospheric pressure vapor deposition method. In the steps, the first quartz plate is polished to have a thickness thinner by 1-20 μm than the desired plate thickness value, and further, a mask is mounted on the first quartz plate, and a plurality of second quartz plates are simultaneously formed by growing quartz thin films each having a pattern shape of the mask on the first quartz plate.;COPYRIGHT: (C)2007,JPO&INPIT