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OPTICAL PATH DIFFERENCE MULTIPLYING DEVICE

机译:光程差倍增装置

摘要

PROBLEM TO BE SOLVED: To provide an optical path difference multiplying device capable of switching to a desired optical path difference multiplication number.;SOLUTION: When multipath is performed, wherein the laser light outputted from a laser interferer body 4 is mode to undergo reciprocative movement by alternately repeating incidence/reflection, between a moving reflector 1 and a fixed reflector 2 of this optical path difference multiplying device 50, the arrangement of the first cube corner prism 16 or the second cube corner prism 26 is switched, and a position where the laser light is reflected by the cube corner prism is switched. Since the number of times of reciprocative motion of the laser light between the moving reflector 1 and the fixed reflector 2 can be switched, length measuring resolution of a laser interference length measuring machine 100 can be improved, corresponding to the increase in the number of times of reciprocation (number of multipaths).;COPYRIGHT: (C)2008,JPO&INPIT
机译:解决的问题:提供一种能够切换到期望的光程差倍增数的光程差倍增装置。解决方案:当执行多程时,从激光干涉体4输出的激光处于往复运动的模式。通过在该光程差倍增装置50的移动反射镜1和固定反射镜2之间交替地重复入射/反射,来切换第一立体角棱镜16或第二立体角棱镜26的配置,并改变其位置。激光被立方角棱镜反射而被切换。由于可以切换激光在移动反射器1与固定反射器2之间的往复运动的次数,因此,随着次数的增加,可以提高激光干涉测长机100的测长分辨率。往复运动(多路径数)。;版权:(C)2008,日本特许厅和INPIT

著录项

  • 公开/公告号JP2007285872A

    专利类型

  • 公开/公告日2007-11-01

    原文格式PDF

  • 申请/专利权人 MITSUTOYO CORP;

    申请/专利号JP20060113364

  • 发明设计人 TANIMURA YOSHIHISA;

    申请日2006-04-17

  • 分类号G01B9/02;

  • 国家 JP

  • 入库时间 2022-08-21 21:15:06

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