X-RAY BEAM PROCESSOR, X-RAY DETECTING SYSTEM AND X-RAY ANALYZER

摘要

PROBLEM TO BE SOLVED: To easily replace three light detecting elements, that is, a double slit analyzer, a parallel slit analyzer and a crystal analyzer by improving the attaching method of the crystal analyzer.;SOLUTION: An analyzer 4 has a first slit 12a, a device 17 for adjusting the width of the X-ray passing part B of the first slit 12a, a second slit 12b, a device 17 for adjusting the width of the X-ray passing part B of the second slit 12b, the analyzer support device 13 provided between the first and second slits 12a and 12b and replacing the parallel slit analyzer 18 and the crystal analyzer 19 one by one to support one of them in a fixed state and a slit position moving device 9 for moving the second slit 12b in parallel. The parallel moving direction of the second slit 12b by the slit position moving device 9 is a direction for displacing the X-ray passing part B of the slit 12b in the advance direction of X rays diffracted by the crystal analyzer 19 when the crystal analyzer 19 is supported by the analyzer support device 13.;COPYRIGHT: (C)2007,JPO&INPIT