FREQUENCY SHIFT OF ROTATIONAL HIGHER HARMONICS IN MEMS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a structure and method for frequency shift in the rotational higher harmonics in the MEMD device.;SOLUTION: The illustrative MEMS device can include a substrate, a sensing electrode attached to the substrate, and a proof mass abutting against the detecting electrode. Several holes or apertures distributed unevenly on the proof mass can be constituted in order to change the distribution of mass in the proof mass. During operation, the frequency at which the proof mass in rotational mode rotates about a central line changes due to the presence of holes or apertures, resulting in the reduction in the rise of higher harmonics into a drive system and a detection system.;COPYRIGHT: (C)2007,JPO&INPIT