AXIAL DIRECTION SLIGHT MOVEMENT MECHANISM WITH ROTARY MECHANISM, AND COARSE AND FINE MOVEMENT POSITIONING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an axial direction slight movement mechanism having a rotary mechanism which can achieve high accuracy and high-response fine movement operation and can prevent a piezoelectric actuator from being damaged.;SOLUTION: The axial direction fine movement mechanism with the rotation mechanism comprises two rolling bearing apparatuses which are arranged opposite and to which pre-load is applied, a housing fixed on a base board and allowed to be engaged with respective outer rings of the rolling bearing apparatuses; and two piezoelectric actuators arranged in parallel in an expanding direction. Respective inner rings of the rolling bearing apparatuses are engaged with a screw shaft, and the inner rings are fixed on the screw shaft in the axial direction. One of the outer rings is restricted in the axial direction, and a piston for pressing the other outer ring and a spacer allowed to be abutted against the piston and having a circular arc-like cross-sectional shape in the axial direction are arranged between the piezoelectric actuator and the other outer ring, to make the axial-direction distance between the outer rings by the expansion of the plurality of piezoelectric actuators change.;COPYRIGHT: (C)2007,JPO&INPIT