METHOD FOR PRODUCING FILTERING MEMBRANE FOR CAPTURING PARTICULATE, FILTERING MEMBRANE FOR CAPTURING PARTICULATE, AND METHOD FOR MEASURING PARTICULATE IN ULTRAPURE WATER

摘要

PROBLEM TO BE SOLVED: To produce a porous membrane usable as a filtering membrane for capturing particulates in ultrapure water with a porous membrane made of an alumina stock as the raw material.;SOLUTION: A porous membrane made of alumina is fired at 800 to 1,200°C, so as to produce a filtering membrane for capturing particulates. In this case, as the porous membrane made of alumina, e.g., alumina formed by anodization, amorphous alumina or amorphous alumina formed by anodization can be used.;COPYRIGHT: (C)2007,JPO&INPIT