MANUFACTURING METHOD OF NONMETALLIC HEATING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a nonmetallic heating element capable of reducing the quantity of raw material gas to be used and manufacturing the long-life nonmetallic heating element of which coating thickness is uniform.;SOLUTION: In the manufacturing method of the nonmetallic heating element, the nonmetallic heating element 1 is prepared and a conductive material is impregnated to both end parts 1a for a predetermined length from both ends of the nonmetallic heating element 1, a coating film is formed on a part 1b except for both the end parts 1a by CVD method and a terminal part 1d is formed by impregnating a conductive material to a part of an area 1c of a coating film forming part 1b contacting with both the end parts 1a.;COPYRIGHT: (C)2008,JPO&INPIT